3/4/2012	3:16:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2012	3:16:46 PM	Recipe started at 3:16 PM
3/4/2012	3:16:46 PM	Helium valve closed
3/4/2012	3:16:46 PM	H2 valve closed
3/4/2012	3:16:46 PM	BCl3 valve closed
3/4/2012	3:16:46 PM	PH3 valve closed
3/4/2012	3:16:46 PM	SiCl4 pre valve closed
3/4/2012	3:16:46 PM	SiCl4 post valve closed
3/4/2012	3:16:46 PM	Main Vac valve closed
3/4/2012	3:16:46 PM	Bypass valve closed
3/4/2012	3:16:46 PM	Bubbler valve closed
3/4/2012	3:16:46 PM	Helium MFC set to  0.000000
3/4/2012	3:16:46 PM	H2 MFC set to  0.000000
3/4/2012	3:16:46 PM	BCl3 MFC set to  0.000000
3/4/2012	3:16:46 PM	PH3 MFC set to  0.000000
3/4/2012	3:16:46 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:16:46 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:16:46 PM	Tube furnace set to 0
3/4/2012	3:16:49 PM	H2 valve closed
3/4/2012	3:16:49 PM	BCl3 valve closed
3/4/2012	3:16:49 PM	PH3 valve closed
3/4/2012	3:16:49 PM	SiCl4 pre valve closed
3/4/2012	3:16:49 PM	SiCl4 post valve closed
3/4/2012	3:16:49 PM	Main Vac valve closed
3/4/2012	3:16:49 PM	Bypass valve closed
3/4/2012	3:16:49 PM	Bubbler valve closed
3/4/2012	3:16:49 PM	Helium valve opened
3/4/2012	3:16:49 PM	Helium MFC set to  500.000000
3/4/2012	3:16:49 PM	H2 MFC set to  0.000000
3/4/2012	3:16:49 PM	BCl3 MFC set to  0.000000
3/4/2012	3:16:49 PM	PH3 MFC set to  0.000000
3/4/2012	3:16:49 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:16:49 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:16:49 PM	Tube furnace set to 0
3/4/2012	3:17:53 PM	Helium valve closed
3/4/2012	3:17:53 PM	H2 valve closed
3/4/2012	3:17:53 PM	BCl3 valve closed
3/4/2012	3:17:53 PM	PH3 valve closed
3/4/2012	3:17:53 PM	SiCl4 pre valve closed
3/4/2012	3:17:53 PM	SiCl4 post valve closed
3/4/2012	3:17:53 PM	Main Vac valve closed
3/4/2012	3:17:53 PM	Bypass valve closed
3/4/2012	3:17:53 PM	Bubbler valve closed
3/4/2012	3:17:53 PM	Helium MFC set to  0.000000
3/4/2012	3:17:53 PM	H2 MFC set to  0.000000
3/4/2012	3:17:53 PM	BCl3 MFC set to  0.000000
3/4/2012	3:17:53 PM	PH3 MFC set to  0.000000
3/4/2012	3:17:53 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:17:53 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:17:53 PM	Tube furnace set to 0
3/4/2012	3:17:54 PM	Run finished at 3:17 PM
3/4/2012	3:17:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2012	3:20:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2012	3:20:12 PM	Recipe started at 3:20 PM
3/4/2012	3:20:12 PM	Helium valve closed
3/4/2012	3:20:12 PM	H2 valve closed
3/4/2012	3:20:12 PM	BCl3 valve closed
3/4/2012	3:20:12 PM	PH3 valve closed
3/4/2012	3:20:12 PM	SiCl4 pre valve closed
3/4/2012	3:20:12 PM	SiCl4 post valve closed
3/4/2012	3:20:12 PM	Main Vac valve closed
3/4/2012	3:20:12 PM	Bubbler valve closed
3/4/2012	3:20:12 PM	Bypass valve opened
3/4/2012	3:20:12 PM	Helium MFC set to  0.000000
3/4/2012	3:20:12 PM	H2 MFC set to  0.000000
3/4/2012	3:20:12 PM	BCl3 MFC set to  0.000000
3/4/2012	3:20:12 PM	PH3 MFC set to  0.000000
3/4/2012	3:20:12 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:20:12 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:20:12 PM	Tube furnace set to 0
3/4/2012	3:21:11 PM	Helium valve closed
3/4/2012	3:21:11 PM	H2 valve closed
3/4/2012	3:21:11 PM	BCl3 valve closed
3/4/2012	3:21:11 PM	PH3 valve closed
3/4/2012	3:21:11 PM	SiCl4 pre valve closed
3/4/2012	3:21:11 PM	SiCl4 post valve closed
3/4/2012	3:21:11 PM	Main Vac valve closed
3/4/2012	3:21:11 PM	Bubbler valve closed
3/4/2012	3:21:11 PM	Bypass valve opened
3/4/2012	3:21:11 PM	Helium MFC set to  0.000000
3/4/2012	3:21:11 PM	H2 MFC set to  0.000000
3/4/2012	3:21:11 PM	BCl3 MFC set to  0.000000
3/4/2012	3:21:11 PM	PH3 MFC set to  0.000000
3/4/2012	3:21:11 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:21:11 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:21:11 PM	Tube furnace set to 0
3/4/2012	3:22:11 PM	Helium valve closed
3/4/2012	3:22:11 PM	H2 valve closed
3/4/2012	3:22:11 PM	BCl3 valve closed
3/4/2012	3:22:11 PM	PH3 valve closed
3/4/2012	3:22:11 PM	SiCl4 pre valve closed
3/4/2012	3:22:11 PM	SiCl4 post valve closed
3/4/2012	3:22:11 PM	Bypass valve closed
3/4/2012	3:22:11 PM	Bubbler valve closed
3/4/2012	3:22:11 PM	Main Vac valve opened
3/4/2012	3:22:11 PM	Helium MFC set to  0.000000
3/4/2012	3:22:11 PM	H2 MFC set to  0.000000
3/4/2012	3:22:11 PM	BCl3 MFC set to  0.000000
3/4/2012	3:22:11 PM	PH3 MFC set to  0.000000
3/4/2012	3:22:11 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:22:11 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:22:11 PM	Tube furnace set to 0
3/4/2012	3:22:12 PM	Run finished at 3:22 PM
3/4/2012	3:22:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2012	3:28:36 PM	Helium MFC set to  20.000000
3/4/2012	3:28:38 PM	Helium valve opened
3/4/2012	3:29:29 PM	Helium valve closed
3/4/2012	3:29:31 PM	Helium MFC set to  0.000000
3/4/2012	3:30:05 PM	Main Vac valve closed
3/4/2012	3:30:30 PM	Main Vac valve opened
3/4/2012	3:31:55 PM	Recipe started at 3:31 PM
3/4/2012	3:31:55 PM	Helium valve closed
3/4/2012	3:31:55 PM	H2 valve closed
3/4/2012	3:31:55 PM	BCl3 valve closed
3/4/2012	3:31:55 PM	PH3 valve closed
3/4/2012	3:31:55 PM	SiCl4 pre valve closed
3/4/2012	3:31:55 PM	SiCl4 post valve closed
3/4/2012	3:31:55 PM	Main Vac valve closed
3/4/2012	3:31:55 PM	Bypass valve closed
3/4/2012	3:31:55 PM	Bubbler valve closed
3/4/2012	3:31:55 PM	Helium MFC set to  0.000000
3/4/2012	3:31:55 PM	H2 MFC set to  0.000000
3/4/2012	3:31:55 PM	BCl3 MFC set to  0.000000
3/4/2012	3:31:55 PM	PH3 MFC set to  0.000000
3/4/2012	3:31:55 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:31:55 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:31:55 PM	Tube furnace set to 0
3/4/2012	3:31:58 PM	Helium valve closed
3/4/2012	3:31:58 PM	BCl3 valve closed
3/4/2012	3:31:58 PM	PH3 valve closed
3/4/2012	3:31:58 PM	SiCl4 pre valve closed
3/4/2012	3:31:58 PM	SiCl4 post valve closed
3/4/2012	3:31:58 PM	Main Vac valve closed
3/4/2012	3:31:58 PM	Bypass valve closed
3/4/2012	3:31:58 PM	Bubbler valve closed
3/4/2012	3:31:58 PM	H2 valve opened
3/4/2012	3:31:58 PM	Helium MFC set to  0.000000
3/4/2012	3:31:58 PM	H2 MFC set to  500.000000
3/4/2012	3:31:58 PM	BCl3 MFC set to  0.000000
3/4/2012	3:31:58 PM	PH3 MFC set to  0.000000
3/4/2012	3:31:58 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:31:58 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:31:58 PM	Tube furnace set to 50
3/4/2012	3:33:05 PM	Helium valve closed
3/4/2012	3:33:05 PM	BCl3 valve closed
3/4/2012	3:33:05 PM	PH3 valve closed
3/4/2012	3:33:05 PM	SiCl4 pre valve closed
3/4/2012	3:33:05 PM	SiCl4 post valve closed
3/4/2012	3:33:05 PM	Main Vac valve closed
3/4/2012	3:33:05 PM	Bypass valve closed
3/4/2012	3:33:05 PM	H2 valve opened
3/4/2012	3:33:05 PM	Bubbler valve opened
3/4/2012	3:33:05 PM	Helium MFC set to  0.000000
3/4/2012	3:33:05 PM	H2 MFC set to  500.000000
3/4/2012	3:33:05 PM	BCl3 MFC set to  0.000000
3/4/2012	3:33:05 PM	PH3 MFC set to  0.000000
3/4/2012	3:33:05 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:33:05 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:33:05 PM	Tube furnace set to 50
3/4/2012	3:33:06 PM	Helium valve closed
3/4/2012	3:33:06 PM	BCl3 valve closed
3/4/2012	3:33:06 PM	PH3 valve closed
3/4/2012	3:33:06 PM	SiCl4 pre valve closed
3/4/2012	3:33:06 PM	SiCl4 post valve closed
3/4/2012	3:33:06 PM	Main Vac valve closed
3/4/2012	3:33:06 PM	Bypass valve closed
3/4/2012	3:33:06 PM	H2 valve opened
3/4/2012	3:33:06 PM	Bubbler valve opened
3/4/2012	3:33:06 PM	Helium MFC set to  0.000000
3/4/2012	3:33:06 PM	H2 MFC set to  450.000000
3/4/2012	3:33:06 PM	BCl3 MFC set to  0.000000
3/4/2012	3:33:06 PM	PH3 MFC set to  0.000000
3/4/2012	3:33:06 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:33:06 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:33:06 PM	Tube furnace set to 1000
3/4/2012	3:53:06 PM	Helium valve closed
3/4/2012	3:53:06 PM	PH3 valve closed
3/4/2012	3:53:06 PM	Main Vac valve closed
3/4/2012	3:53:06 PM	Bypass valve closed
3/4/2012	3:53:06 PM	H2 valve opened
3/4/2012	3:53:06 PM	BCl3 valve opened
3/4/2012	3:53:06 PM	SiCl4 pre valve opened
3/4/2012	3:53:06 PM	SiCl4 post valve opened
3/4/2012	3:53:06 PM	Bubbler valve opened
3/4/2012	3:53:06 PM	Helium MFC set to  0.000000
3/4/2012	3:53:06 PM	H2 MFC set to  450.000000
3/4/2012	3:53:06 PM	BCl3 MFC set to  1.000000
3/4/2012	3:53:06 PM	PH3 MFC set to  0.000000
3/4/2012	3:53:06 PM	SiCl4 MFC set to  50.000000
3/4/2012	3:53:06 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:53:06 PM	Tube furnace set to 1000
3/4/2012	3:54:06 PM	Helium valve closed
3/4/2012	3:54:06 PM	BCl3 valve closed
3/4/2012	3:54:06 PM	PH3 valve closed
3/4/2012	3:54:06 PM	SiCl4 pre valve closed
3/4/2012	3:54:06 PM	SiCl4 post valve closed
3/4/2012	3:54:06 PM	Main Vac valve closed
3/4/2012	3:54:06 PM	Bypass valve closed
3/4/2012	3:54:06 PM	H2 valve opened
3/4/2012	3:54:06 PM	Bubbler valve opened
3/4/2012	3:54:06 PM	Helium MFC set to  0.000000
3/4/2012	3:54:06 PM	H2 MFC set to  500.000000
3/4/2012	3:54:06 PM	BCl3 MFC set to  0.000000
3/4/2012	3:54:06 PM	PH3 MFC set to  0.000000
3/4/2012	3:54:06 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:54:06 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:54:07 PM	Tube furnace set to 750
3/4/2012	3:55:07 PM	H2 valve closed
3/4/2012	3:55:07 PM	BCl3 valve closed
3/4/2012	3:55:07 PM	PH3 valve closed
3/4/2012	3:55:07 PM	SiCl4 pre valve closed
3/4/2012	3:55:07 PM	SiCl4 post valve closed
3/4/2012	3:55:07 PM	Main Vac valve closed
3/4/2012	3:55:07 PM	Bypass valve closed
3/4/2012	3:55:07 PM	Helium valve opened
3/4/2012	3:55:07 PM	Bubbler valve opened
3/4/2012	3:55:07 PM	Helium MFC set to  400.000000
3/4/2012	3:55:07 PM	H2 MFC set to  0.000000
3/4/2012	3:55:07 PM	BCl3 MFC set to  0.000000
3/4/2012	3:55:07 PM	PH3 MFC set to  0.000000
3/4/2012	3:55:07 PM	SiCl4 MFC set to  0.000000
3/4/2012	3:55:07 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	3:55:07 PM	Tube furnace set to 0
3/4/2012	4:20:07 PM	Helium valve closed
3/4/2012	4:20:07 PM	H2 valve closed
3/4/2012	4:20:07 PM	BCl3 valve closed
3/4/2012	4:20:07 PM	PH3 valve closed
3/4/2012	4:20:07 PM	SiCl4 pre valve closed
3/4/2012	4:20:07 PM	SiCl4 post valve closed
3/4/2012	4:20:07 PM	Main Vac valve closed
3/4/2012	4:20:07 PM	Bypass valve closed
3/4/2012	4:20:07 PM	Bubbler valve closed
3/4/2012	4:20:07 PM	Helium MFC set to  0.000000
3/4/2012	4:20:07 PM	H2 MFC set to  0.000000
3/4/2012	4:20:07 PM	BCl3 MFC set to  0.000000
3/4/2012	4:20:07 PM	PH3 MFC set to  0.000000
3/4/2012	4:20:07 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:20:07 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:20:07 PM	Tube furnace set to 50
3/4/2012	4:25:07 PM	Helium valve closed
3/4/2012	4:25:07 PM	H2 valve closed
3/4/2012	4:25:07 PM	BCl3 valve closed
3/4/2012	4:25:07 PM	PH3 valve closed
3/4/2012	4:25:07 PM	SiCl4 pre valve closed
3/4/2012	4:25:07 PM	SiCl4 post valve closed
3/4/2012	4:25:07 PM	Main Vac valve closed
3/4/2012	4:25:07 PM	Bubbler valve closed
3/4/2012	4:25:07 PM	Bypass valve opened
3/4/2012	4:25:07 PM	Helium MFC set to  0.000000
3/4/2012	4:25:07 PM	H2 MFC set to  0.000000
3/4/2012	4:25:07 PM	BCl3 MFC set to  0.000000
3/4/2012	4:25:07 PM	PH3 MFC set to  0.000000
3/4/2012	4:25:07 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:25:07 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:25:07 PM	Tube furnace set to 0
3/4/2012	4:30:07 PM	Helium valve closed
3/4/2012	4:30:07 PM	H2 valve closed
3/4/2012	4:30:07 PM	BCl3 valve closed
3/4/2012	4:30:07 PM	PH3 valve closed
3/4/2012	4:30:07 PM	SiCl4 pre valve closed
3/4/2012	4:30:07 PM	SiCl4 post valve closed
3/4/2012	4:30:07 PM	Bypass valve closed
3/4/2012	4:30:07 PM	Bubbler valve closed
3/4/2012	4:30:07 PM	Main Vac valve opened
3/4/2012	4:30:07 PM	Helium MFC set to  0.000000
3/4/2012	4:30:07 PM	H2 MFC set to  0.000000
3/4/2012	4:30:07 PM	BCl3 MFC set to  0.000000
3/4/2012	4:30:07 PM	PH3 MFC set to  0.000000
3/4/2012	4:30:07 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:30:07 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:30:07 PM	Tube furnace set to 0
3/4/2012	4:30:08 PM	Run finished at 4:30 PM
3/4/2012	4:40:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2012	4:40:06 PM	Recipe started at 4:40 PM
3/4/2012	4:40:06 PM	Helium valve closed
3/4/2012	4:40:06 PM	H2 valve closed
3/4/2012	4:40:06 PM	BCl3 valve closed
3/4/2012	4:40:06 PM	PH3 valve closed
3/4/2012	4:40:06 PM	SiCl4 pre valve closed
3/4/2012	4:40:06 PM	SiCl4 post valve closed
3/4/2012	4:40:06 PM	Main Vac valve closed
3/4/2012	4:40:06 PM	Bypass valve closed
3/4/2012	4:40:06 PM	Bubbler valve closed
3/4/2012	4:40:06 PM	Helium MFC set to  0.000000
3/4/2012	4:40:06 PM	H2 MFC set to  0.000000
3/4/2012	4:40:06 PM	BCl3 MFC set to  0.000000
3/4/2012	4:40:06 PM	PH3 MFC set to  0.000000
3/4/2012	4:40:06 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:40:06 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:40:06 PM	Tube furnace set to 0
3/4/2012	4:40:09 PM	H2 valve closed
3/4/2012	4:40:09 PM	BCl3 valve closed
3/4/2012	4:40:09 PM	PH3 valve closed
3/4/2012	4:40:09 PM	SiCl4 pre valve closed
3/4/2012	4:40:09 PM	SiCl4 post valve closed
3/4/2012	4:40:09 PM	Main Vac valve closed
3/4/2012	4:40:09 PM	Bypass valve closed
3/4/2012	4:40:09 PM	Bubbler valve closed
3/4/2012	4:40:09 PM	Helium valve opened
3/4/2012	4:40:09 PM	Helium MFC set to  500.000000
3/4/2012	4:40:09 PM	H2 MFC set to  0.000000
3/4/2012	4:40:09 PM	BCl3 MFC set to  0.000000
3/4/2012	4:40:09 PM	PH3 MFC set to  0.000000
3/4/2012	4:40:09 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:40:09 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:40:10 PM	Tube furnace set to 0
3/4/2012	4:41:14 PM	Helium valve closed
3/4/2012	4:41:14 PM	H2 valve closed
3/4/2012	4:41:14 PM	BCl3 valve closed
3/4/2012	4:41:14 PM	PH3 valve closed
3/4/2012	4:41:14 PM	SiCl4 pre valve closed
3/4/2012	4:41:14 PM	SiCl4 post valve closed
3/4/2012	4:41:14 PM	Main Vac valve closed
3/4/2012	4:41:14 PM	Bypass valve closed
3/4/2012	4:41:14 PM	Bubbler valve closed
3/4/2012	4:41:14 PM	Helium MFC set to  0.000000
3/4/2012	4:41:14 PM	H2 MFC set to  0.000000
3/4/2012	4:41:14 PM	BCl3 MFC set to  0.000000
3/4/2012	4:41:14 PM	PH3 MFC set to  0.000000
3/4/2012	4:41:14 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:41:14 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:41:14 PM	Tube furnace set to 0
3/4/2012	4:41:15 PM	Run finished at 4:41 PM
3/4/2012	4:41:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2012	4:47:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2012	4:47:17 PM	Recipe started at 4:47 PM
3/4/2012	4:47:17 PM	Helium valve closed
3/4/2012	4:47:17 PM	H2 valve closed
3/4/2012	4:47:17 PM	BCl3 valve closed
3/4/2012	4:47:17 PM	PH3 valve closed
3/4/2012	4:47:17 PM	SiCl4 pre valve closed
3/4/2012	4:47:17 PM	SiCl4 post valve closed
3/4/2012	4:47:17 PM	Main Vac valve closed
3/4/2012	4:47:17 PM	Bubbler valve closed
3/4/2012	4:47:17 PM	Bypass valve opened
3/4/2012	4:47:17 PM	Helium MFC set to  0.000000
3/4/2012	4:47:17 PM	H2 MFC set to  0.000000
3/4/2012	4:47:17 PM	BCl3 MFC set to  0.000000
3/4/2012	4:47:17 PM	PH3 MFC set to  0.000000
3/4/2012	4:47:17 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:47:17 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:47:17 PM	Tube furnace set to 0
3/4/2012	4:48:19 PM	Helium valve closed
3/4/2012	4:48:19 PM	H2 valve closed
3/4/2012	4:48:19 PM	BCl3 valve closed
3/4/2012	4:48:19 PM	PH3 valve closed
3/4/2012	4:48:19 PM	SiCl4 pre valve closed
3/4/2012	4:48:19 PM	SiCl4 post valve closed
3/4/2012	4:48:19 PM	Main Vac valve closed
3/4/2012	4:48:19 PM	Bubbler valve closed
3/4/2012	4:48:19 PM	Bypass valve opened
3/4/2012	4:48:19 PM	Helium MFC set to  0.000000
3/4/2012	4:48:19 PM	H2 MFC set to  0.000000
3/4/2012	4:48:19 PM	BCl3 MFC set to  0.000000
3/4/2012	4:48:19 PM	PH3 MFC set to  0.000000
3/4/2012	4:48:19 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:48:19 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:48:19 PM	Tube furnace set to 0
3/4/2012	4:49:19 PM	Helium valve closed
3/4/2012	4:49:19 PM	H2 valve closed
3/4/2012	4:49:19 PM	BCl3 valve closed
3/4/2012	4:49:19 PM	PH3 valve closed
3/4/2012	4:49:19 PM	SiCl4 pre valve closed
3/4/2012	4:49:19 PM	SiCl4 post valve closed
3/4/2012	4:49:19 PM	Bypass valve closed
3/4/2012	4:49:19 PM	Bubbler valve closed
3/4/2012	4:49:19 PM	Main Vac valve opened
3/4/2012	4:49:19 PM	Helium MFC set to  0.000000
3/4/2012	4:49:19 PM	H2 MFC set to  0.000000
3/4/2012	4:49:19 PM	BCl3 MFC set to  0.000000
3/4/2012	4:49:19 PM	PH3 MFC set to  0.000000
3/4/2012	4:49:19 PM	SiCl4 MFC set to  0.000000
3/4/2012	4:49:19 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	4:49:20 PM	Tube furnace set to 0
3/4/2012	4:49:21 PM	Run finished at 4:49 PM
3/4/2012	4:49:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2012	5:04:55 PM	Helium MFC set to  20.000000
3/4/2012	5:04:56 PM	Helium valve opened
3/4/2012	5:05:33 PM	Helium valve closed
3/4/2012	5:05:35 PM	Helium MFC set to  0.000000
3/4/2012	5:06:00 PM	Main Vac valve closed
3/4/2012	5:06:37 PM	Main Vac valve opened
3/4/2012	5:07:49 PM	Main Vac valve closed
3/4/2012	5:08:33 PM	Main Vac valve opened
3/4/2012	5:09:15 PM	Main Vac valve closed
3/4/2012	5:09:27 PM	Main Vac valve opened
3/4/2012	5:10:05 PM	Recipe started at 5:10 PM
3/4/2012	5:10:05 PM	Helium valve closed
3/4/2012	5:10:05 PM	H2 valve closed
3/4/2012	5:10:05 PM	BCl3 valve closed
3/4/2012	5:10:05 PM	PH3 valve closed
3/4/2012	5:10:05 PM	SiCl4 pre valve closed
3/4/2012	5:10:05 PM	SiCl4 post valve closed
3/4/2012	5:10:05 PM	Main Vac valve closed
3/4/2012	5:10:05 PM	Bypass valve closed
3/4/2012	5:10:05 PM	Bubbler valve closed
3/4/2012	5:10:05 PM	Helium MFC set to  0.000000
3/4/2012	5:10:05 PM	H2 MFC set to  0.000000
3/4/2012	5:10:05 PM	BCl3 MFC set to  0.000000
3/4/2012	5:10:05 PM	PH3 MFC set to  0.000000
3/4/2012	5:10:05 PM	SiCl4 MFC set to  0.000000
3/4/2012	5:10:05 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	5:10:05 PM	Tube furnace set to 0
3/4/2012	5:10:08 PM	Helium valve closed
3/4/2012	5:10:08 PM	BCl3 valve closed
3/4/2012	5:10:08 PM	PH3 valve closed
3/4/2012	5:10:08 PM	SiCl4 pre valve closed
3/4/2012	5:10:08 PM	SiCl4 post valve closed
3/4/2012	5:10:08 PM	Main Vac valve closed
3/4/2012	5:10:08 PM	Bypass valve closed
3/4/2012	5:10:08 PM	Bubbler valve closed
3/4/2012	5:10:08 PM	H2 valve opened
3/4/2012	5:10:08 PM	Helium MFC set to  0.000000
3/4/2012	5:10:08 PM	H2 MFC set to  500.000000
3/4/2012	5:10:08 PM	BCl3 MFC set to  0.000000
3/4/2012	5:10:08 PM	PH3 MFC set to  0.000000
3/4/2012	5:10:08 PM	SiCl4 MFC set to  0.000000
3/4/2012	5:10:08 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	5:10:08 PM	Tube furnace set to 50
3/4/2012	5:11:14 PM	Helium valve closed
3/4/2012	5:11:14 PM	BCl3 valve closed
3/4/2012	5:11:14 PM	PH3 valve closed
3/4/2012	5:11:14 PM	SiCl4 pre valve closed
3/4/2012	5:11:14 PM	SiCl4 post valve closed
3/4/2012	5:11:14 PM	Main Vac valve closed
3/4/2012	5:11:14 PM	Bypass valve closed
3/4/2012	5:11:14 PM	H2 valve opened
3/4/2012	5:11:14 PM	Bubbler valve opened
3/4/2012	5:11:14 PM	Helium MFC set to  0.000000
3/4/2012	5:11:14 PM	H2 MFC set to  500.000000
3/4/2012	5:11:14 PM	BCl3 MFC set to  0.000000
3/4/2012	5:11:14 PM	PH3 MFC set to  0.000000
3/4/2012	5:11:14 PM	SiCl4 MFC set to  0.000000
3/4/2012	5:11:14 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	5:11:14 PM	Tube furnace set to 50
3/4/2012	5:11:15 PM	Helium valve closed
3/4/2012	5:11:15 PM	BCl3 valve closed
3/4/2012	5:11:15 PM	PH3 valve closed
3/4/2012	5:11:15 PM	SiCl4 pre valve closed
3/4/2012	5:11:15 PM	SiCl4 post valve closed
3/4/2012	5:11:15 PM	Main Vac valve closed
3/4/2012	5:11:15 PM	Bypass valve closed
3/4/2012	5:11:15 PM	H2 valve opened
3/4/2012	5:11:15 PM	Bubbler valve opened
3/4/2012	5:11:15 PM	Helium MFC set to  0.000000
3/4/2012	5:11:15 PM	H2 MFC set to  450.000000
3/4/2012	5:11:15 PM	BCl3 MFC set to  0.000000
3/4/2012	5:11:15 PM	PH3 MFC set to  0.000000
3/4/2012	5:11:15 PM	SiCl4 MFC set to  0.000000
3/4/2012	5:11:15 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	5:11:15 PM	Tube furnace set to 1000
3/4/2012	5:31:15 PM	Helium valve closed
3/4/2012	5:31:15 PM	PH3 valve closed
3/4/2012	5:31:15 PM	Main Vac valve closed
3/4/2012	5:31:15 PM	Bypass valve closed
3/4/2012	5:31:15 PM	H2 valve opened
3/4/2012	5:31:15 PM	BCl3 valve opened
3/4/2012	5:31:15 PM	SiCl4 pre valve opened
3/4/2012	5:31:15 PM	SiCl4 post valve opened
3/4/2012	5:31:15 PM	Bubbler valve opened
3/4/2012	5:31:15 PM	Helium MFC set to  0.000000
3/4/2012	5:31:15 PM	H2 MFC set to  450.000000
3/4/2012	5:31:15 PM	BCl3 MFC set to  1.200000
3/4/2012	5:31:15 PM	PH3 MFC set to  0.000000
3/4/2012	5:31:15 PM	SiCl4 MFC set to  50.000000
3/4/2012	5:31:15 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	5:31:16 PM	Tube furnace set to 1000
3/4/2012	5:46:16 PM	Helium valve closed
3/4/2012	5:46:16 PM	BCl3 valve closed
3/4/2012	5:46:16 PM	PH3 valve closed
3/4/2012	5:46:16 PM	SiCl4 pre valve closed
3/4/2012	5:46:16 PM	SiCl4 post valve closed
3/4/2012	5:46:16 PM	Main Vac valve closed
3/4/2012	5:46:16 PM	Bypass valve closed
3/4/2012	5:46:16 PM	H2 valve opened
3/4/2012	5:46:16 PM	Bubbler valve opened
3/4/2012	5:46:16 PM	Helium MFC set to  0.000000
3/4/2012	5:46:16 PM	H2 MFC set to  500.000000
3/4/2012	5:46:16 PM	BCl3 MFC set to  0.000000
3/4/2012	5:46:16 PM	PH3 MFC set to  0.000000
3/4/2012	5:46:16 PM	SiCl4 MFC set to  0.000000
3/4/2012	5:46:16 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	5:46:16 PM	Tube furnace set to 750
3/4/2012	5:47:16 PM	H2 valve closed
3/4/2012	5:47:16 PM	BCl3 valve closed
3/4/2012	5:47:16 PM	PH3 valve closed
3/4/2012	5:47:16 PM	SiCl4 pre valve closed
3/4/2012	5:47:16 PM	SiCl4 post valve closed
3/4/2012	5:47:16 PM	Main Vac valve closed
3/4/2012	5:47:16 PM	Bypass valve closed
3/4/2012	5:47:16 PM	Helium valve opened
3/4/2012	5:47:16 PM	Bubbler valve opened
3/4/2012	5:47:16 PM	Helium MFC set to  400.000000
3/4/2012	5:47:16 PM	H2 MFC set to  0.000000
3/4/2012	5:47:16 PM	BCl3 MFC set to  0.000000
3/4/2012	5:47:16 PM	PH3 MFC set to  0.000000
3/4/2012	5:47:16 PM	SiCl4 MFC set to  0.000000
3/4/2012	5:47:16 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	5:47:16 PM	Tube furnace set to 0
3/4/2012	6:12:16 PM	Helium valve closed
3/4/2012	6:12:16 PM	H2 valve closed
3/4/2012	6:12:16 PM	BCl3 valve closed
3/4/2012	6:12:16 PM	PH3 valve closed
3/4/2012	6:12:16 PM	SiCl4 pre valve closed
3/4/2012	6:12:16 PM	SiCl4 post valve closed
3/4/2012	6:12:16 PM	Main Vac valve closed
3/4/2012	6:12:16 PM	Bypass valve closed
3/4/2012	6:12:16 PM	Bubbler valve closed
3/4/2012	6:12:16 PM	Helium MFC set to  0.000000
3/4/2012	6:12:16 PM	H2 MFC set to  0.000000
3/4/2012	6:12:16 PM	BCl3 MFC set to  0.000000
3/4/2012	6:12:16 PM	PH3 MFC set to  0.000000
3/4/2012	6:12:16 PM	SiCl4 MFC set to  0.000000
3/4/2012	6:12:16 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	6:12:16 PM	Tube furnace set to 50
3/4/2012	6:17:16 PM	Helium valve closed
3/4/2012	6:17:16 PM	H2 valve closed
3/4/2012	6:17:16 PM	BCl3 valve closed
3/4/2012	6:17:16 PM	PH3 valve closed
3/4/2012	6:17:16 PM	SiCl4 pre valve closed
3/4/2012	6:17:16 PM	SiCl4 post valve closed
3/4/2012	6:17:16 PM	Main Vac valve closed
3/4/2012	6:17:16 PM	Bubbler valve closed
3/4/2012	6:17:16 PM	Bypass valve opened
3/4/2012	6:17:16 PM	Helium MFC set to  0.000000
3/4/2012	6:17:16 PM	H2 MFC set to  0.000000
3/4/2012	6:17:16 PM	BCl3 MFC set to  0.000000
3/4/2012	6:17:16 PM	PH3 MFC set to  0.000000
3/4/2012	6:17:16 PM	SiCl4 MFC set to  0.000000
3/4/2012	6:17:16 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	6:17:16 PM	Tube furnace set to 0
3/4/2012	6:22:16 PM	Helium valve closed
3/4/2012	6:22:16 PM	H2 valve closed
3/4/2012	6:22:16 PM	BCl3 valve closed
3/4/2012	6:22:16 PM	PH3 valve closed
3/4/2012	6:22:16 PM	SiCl4 pre valve closed
3/4/2012	6:22:16 PM	SiCl4 post valve closed
3/4/2012	6:22:16 PM	Bypass valve closed
3/4/2012	6:22:16 PM	Bubbler valve closed
3/4/2012	6:22:16 PM	Main Vac valve opened
3/4/2012	6:22:16 PM	Helium MFC set to  0.000000
3/4/2012	6:22:16 PM	H2 MFC set to  0.000000
3/4/2012	6:22:16 PM	BCl3 MFC set to  0.000000
3/4/2012	6:22:16 PM	PH3 MFC set to  0.000000
3/4/2012	6:22:16 PM	SiCl4 MFC set to  0.000000
3/4/2012	6:22:16 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	6:22:17 PM	Tube furnace set to 0
3/4/2012	6:22:18 PM	Run finished at 6:22 PM
3/4/2012	7:54:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2012	7:54:38 PM	Recipe started at 7:54 PM
3/4/2012	7:54:38 PM	Helium valve closed
3/4/2012	7:54:38 PM	H2 valve closed
3/4/2012	7:54:38 PM	BCl3 valve closed
3/4/2012	7:54:38 PM	PH3 valve closed
3/4/2012	7:54:38 PM	SiCl4 pre valve closed
3/4/2012	7:54:38 PM	SiCl4 post valve closed
3/4/2012	7:54:38 PM	Main Vac valve closed
3/4/2012	7:54:38 PM	Bypass valve closed
3/4/2012	7:54:38 PM	Bubbler valve closed
3/4/2012	7:54:38 PM	Helium MFC set to  0.000000
3/4/2012	7:54:38 PM	H2 MFC set to  0.000000
3/4/2012	7:54:38 PM	BCl3 MFC set to  0.000000
3/4/2012	7:54:38 PM	PH3 MFC set to  0.000000
3/4/2012	7:54:38 PM	SiCl4 MFC set to  0.000000
3/4/2012	7:54:38 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	7:54:39 PM	Tube furnace set to 0
3/4/2012	7:54:42 PM	H2 valve closed
3/4/2012	7:54:42 PM	BCl3 valve closed
3/4/2012	7:54:42 PM	PH3 valve closed
3/4/2012	7:54:42 PM	SiCl4 pre valve closed
3/4/2012	7:54:42 PM	SiCl4 post valve closed
3/4/2012	7:54:42 PM	Main Vac valve closed
3/4/2012	7:54:42 PM	Bypass valve closed
3/4/2012	7:54:42 PM	Bubbler valve closed
3/4/2012	7:54:42 PM	Helium valve opened
3/4/2012	7:54:42 PM	Helium MFC set to  500.000000
3/4/2012	7:54:42 PM	H2 MFC set to  0.000000
3/4/2012	7:54:42 PM	BCl3 MFC set to  0.000000
3/4/2012	7:54:42 PM	PH3 MFC set to  0.000000
3/4/2012	7:54:42 PM	SiCl4 MFC set to  0.000000
3/4/2012	7:54:42 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	7:54:42 PM	Tube furnace set to 0
3/4/2012	7:55:47 PM	Helium valve closed
3/4/2012	7:55:47 PM	H2 valve closed
3/4/2012	7:55:47 PM	BCl3 valve closed
3/4/2012	7:55:47 PM	PH3 valve closed
3/4/2012	7:55:47 PM	SiCl4 pre valve closed
3/4/2012	7:55:47 PM	SiCl4 post valve closed
3/4/2012	7:55:47 PM	Main Vac valve closed
3/4/2012	7:55:47 PM	Bypass valve closed
3/4/2012	7:55:47 PM	Bubbler valve closed
3/4/2012	7:55:47 PM	Helium MFC set to  0.000000
3/4/2012	7:55:47 PM	H2 MFC set to  0.000000
3/4/2012	7:55:47 PM	BCl3 MFC set to  0.000000
3/4/2012	7:55:47 PM	PH3 MFC set to  0.000000
3/4/2012	7:55:47 PM	SiCl4 MFC set to  0.000000
3/4/2012	7:55:47 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	7:55:47 PM	Tube furnace set to 0
3/4/2012	7:55:48 PM	Run finished at 7:55 PM
3/4/2012	7:55:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/4/2012	7:58:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/4/2012	7:58:31 PM	Recipe started at 7:58 PM
3/4/2012	7:58:31 PM	Helium valve closed
3/4/2012	7:58:31 PM	H2 valve closed
3/4/2012	7:58:31 PM	BCl3 valve closed
3/4/2012	7:58:31 PM	PH3 valve closed
3/4/2012	7:58:31 PM	SiCl4 pre valve closed
3/4/2012	7:58:31 PM	SiCl4 post valve closed
3/4/2012	7:58:31 PM	Main Vac valve closed
3/4/2012	7:58:31 PM	Bubbler valve closed
3/4/2012	7:58:31 PM	Bypass valve opened
3/4/2012	7:58:31 PM	Helium MFC set to  0.000000
3/4/2012	7:58:31 PM	H2 MFC set to  0.000000
3/4/2012	7:58:31 PM	BCl3 MFC set to  0.000000
3/4/2012	7:58:31 PM	PH3 MFC set to  0.000000
3/4/2012	7:58:31 PM	SiCl4 MFC set to  0.000000
3/4/2012	7:58:31 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	7:58:31 PM	Tube furnace set to 0
3/4/2012	7:59:30 PM	Helium valve closed
3/4/2012	7:59:30 PM	H2 valve closed
3/4/2012	7:59:30 PM	BCl3 valve closed
3/4/2012	7:59:30 PM	PH3 valve closed
3/4/2012	7:59:30 PM	SiCl4 pre valve closed
3/4/2012	7:59:30 PM	SiCl4 post valve closed
3/4/2012	7:59:30 PM	Main Vac valve closed
3/4/2012	7:59:30 PM	Bubbler valve closed
3/4/2012	7:59:30 PM	Bypass valve opened
3/4/2012	7:59:30 PM	Helium MFC set to  0.000000
3/4/2012	7:59:30 PM	H2 MFC set to  0.000000
3/4/2012	7:59:30 PM	BCl3 MFC set to  0.000000
3/4/2012	7:59:30 PM	PH3 MFC set to  0.000000
3/4/2012	7:59:30 PM	SiCl4 MFC set to  0.000000
3/4/2012	7:59:30 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	7:59:30 PM	Tube furnace set to 0
3/4/2012	8:00:30 PM	Helium valve closed
3/4/2012	8:00:30 PM	H2 valve closed
3/4/2012	8:00:30 PM	BCl3 valve closed
3/4/2012	8:00:30 PM	PH3 valve closed
3/4/2012	8:00:30 PM	SiCl4 pre valve closed
3/4/2012	8:00:30 PM	SiCl4 post valve closed
3/4/2012	8:00:30 PM	Bypass valve closed
3/4/2012	8:00:30 PM	Bubbler valve closed
3/4/2012	8:00:30 PM	Main Vac valve opened
3/4/2012	8:00:30 PM	Helium MFC set to  0.000000
3/4/2012	8:00:30 PM	H2 MFC set to  0.000000
3/4/2012	8:00:30 PM	BCl3 MFC set to  0.000000
3/4/2012	8:00:30 PM	PH3 MFC set to  0.000000
3/4/2012	8:00:30 PM	SiCl4 MFC set to  0.000000
3/4/2012	8:00:30 PM	Bypass solenoid MFC set to  0.000000
3/4/2012	8:00:30 PM	Tube furnace set to 0
3/4/2012	8:00:31 PM	Run finished at 8:00 PM
3/4/2012	8:00:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
